Mission and Vision

Our mission is to perform fundamental and applied research in the fields of microelectronic, optoelectronic and general microsystem technologies (MST) and materials, including both microelectromechanical systems (MEMS) and nanosystems (NEMS), with an accent on practically applicable sensors and detectors of physical and chemical quantities.

Our mission is based on our belief that MEMS and generally microsystem and nanosystem technologies will be among the most significant factors of the development of world science, industry and general welfare and that merging of micro and nanosystem technologies with everyday life will continue at an even faster pace than now.

We strive not to miss any research step in the cycle starting from the fundamental theory and ending with the finished device. Typically we begin with fundamental concepts and theoretical investigation, continue with analytical models and numerical simulations, proceed to fabrication and end with full characterization of our devices. The final step is often s small series production of the device or system. The research steps in CMT are interconnected and interdependent because of the very character of the technologies we use and which are necessarily connected in a single body.

Shortly about CMT

Centre of Microelectronic Technologies (CMT), previously Centre of Microelectronic Technologies and Single Crystals, is a department within the Institute of Chemistry, Technology and Metallurgy (ICTM), itself a member of the University of Belgrade. CMT performs research and development in the field of microelectronic technologies, microsystems and nanosystems.

CMT is the only producer of microchips in Serbia. In our production we do not use licenses and know how of third parties – all CMT devices and systems represent solely the results of the work of the CMT staff. The whole production cycle, from fundamental physical, electronical, chemical and other concepts through analytical modeling and numerical simulation, photolithography and planar technology procedures, microfabrication, production of the chip itself, its mounting and encapsulation, measurement and testing, its incorporation into the system is 100% a result of research in CMT labs.

Currently CMT is the only research team in Serbia and in western Balkans to perform research and fabrication of MEMS and NEMS devices (micro and nanosystems). For this we use micromachining and other technologies of micro and nanofabrication.

CMT is mostly oriented to research and development of various types of sensors, detectors and measurement transmitters. The results of the CMT research are usually finished devices, components and systems that are directly applied in industry, medicine, etc. Based on its own technologies and its own fundamental research, CMT utilized its original design to develop and produce for market silicon piezoresistive pressure sensors, absolute and gauge pressure, pressure difference, level and temperature transmitters, silicon PIN photodiodes, InSb and HgCdTe infrared detectors, tin oxide-based transparent heating elements, etc.

CMT is ISO 9001:2001 certified. A part of the research is performed for Power Industry of Serbia, for instance for Thermoelectric power plants Nikola Tesla, Morava and Vlasina power plants, also for Oil Industry of Serbia, Jugopetrol, various drinking water systems, sugar factories, etc.

The technological system in CMT is highly complex and represents an organic unit where its parts complement each other, giving a rounded chain of complex and multidisciplinary procedures. This system has been growing and improving for decades now and in this moment it consists of several hundreds of items of different interconnected and fully functional pieces of equipment.

In the course of its research Centre mastered a number of technologies, the most important ones being

•  planar technology of silicon and other semiconductors
•  technologies of bulk and surface micromachining
•  technologies of epitaxial growth of single crystal layers
•  technologies of fabrication of bulk single crystals
•  thin film deposition

Through the project REGMINA the Centre was funded by EU within the FP7 programme as a regional centre of excellence for western Balkans for the field of micro and nanosystems. It is accredited by Serbian Ministry of Education, Science and Technological Development as a national centre of excellence for micro and nanosystems. CMT performs research projects on international and national level. Until now, all our projects have been very successful.

A large number of research topics novel on national or even international level was started at the CMT, and many microelectronic and microsystem devices were first produced in CMT.

Today CMT gathers more than 30 permanent staff members, including 22 researchers. We have 13 staff members with Ph.D., 3 with magister of science degree, 3 junior researchers pursuing their Ph.D. and 3 staff members with diploma engineer degree. 14 of these are electrical engineers, 3 are in chemical engineering, 2 are mechanical engineers, 2 are physical chemists and we have one physicist.

History

 

Our centre is a division of the ICTM – Institute of Chemistry, Technology and Metallurgy, a part of the University of Belgrade. ICTM is a chemical engineering research organization founded in 1863 as the First Serbian Chemical Laboratory. The organization was transformed several times across the span of almost one and a half century to become today's modern research institution.

 

In 1961 a department was formed for semiconductors and special materials and procedures. In the period 1968 – 1969 this department further divided into the Department for microelectronic technologies, the Department for single crystals and the Department for special materials. In 1983 these departments merged into the Institute of Microelectronic Technologies and Single Crystals which in 2013 was renamed to Centre of Microelectronic Technologies.

 

Some of the important results of our research:

 

1964 Silicon solar cells

1967 High-frequency silicon planar transistors

1968 Semiconductor microphone

1968 First Yugoslav silicon integrated circuits

1970 MOS transistor

1972 Heating elements based on transparent conductive oxides

1975 Silicon p-i-n photodiode

1977 Single-heterojunction semiconductor laser

1983 MEMS Si pressure sensor

1986 InSb photovoltaic infrared detectors

1990 HgCdTe IR detectors for night vision (photoconductive and photovoltaic)

2000 Pressure transmitters

2000 Noise and fluctuations in MEMS

2000 adsorption-desorption processes in MEMS

2002 Micro and nanomechanical systems

2007 Metamaterials for chemical sensors

2007 Fluctuations and noise in plasmonic devices

2009 Intelligent pressure and temperature transmitters

2010 MEMS infrared detector arrays

2011 Microcantilever sensors

2014 Chemical sensors