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  <td width=590 valign=top style='width:442.8pt;padding:0cm 5.4pt 0cm 5.4pt'>
  <p style='margin-top:5.0pt;margin-right:72.0pt;margin-bottom:0cm;margin-left:
  0cm;margin-bottom:.0001pt'><b><span lang=EN-US style='font-size:14.0pt;
  font-family:"Verdana","sans-serif";color:#C00000'>MEMS and NEMS structures, components,
  devices and systems</span></b></p>
  <p style='margin-top:5.0pt;margin-right:72.0pt;margin-bottom:0cm;margin-left:
  0cm;margin-bottom:.0001pt'><span lang=SR-CYRL-RS style='font-size:9.0pt;
  font-family:"Verdana","sans-serif"'>&nbsp;</span></p>
  <p><span lang=EN-US style='font-size:10.0pt;font-family:"Verdana","sans-serif";
  color:black'>Group leaders</span><span lang=SR-CYRL-RS style='font-size:10.0pt;
  font-family:"Verdana","sans-serif";color:black'>: Žarko Lazić, Milče M.
  Smilјanić</span></p>
  <p><span lang=EN-US style='font-size:10.0pt;font-family:"Verdana","sans-serif";
  color:black'>The group deals with the fundamental concepts, design,
  fabrication and testing of structures, components, devices and systems. This
  includes concept, design and fabrication of MEMS and NEMS sensor and actuator
  chips, as well as the development of specific procedures in planar
  technologies and micromachining.</span></p>
  <p><img width=394 height=321 src="MEMS.eng_files/image001.jpg"><span
  lang=SR-CYRL-RS>&nbsp; </span></p>
  <p class=MsoNormal><b><span lang=SR-CYRL-RS style='font-size:10.0pt;
  font-family:"Verdana","sans-serif"'>T</span></b><b><span lang=EN-US
  style='font-size:10.0pt;font-family:"Verdana","sans-serif"'>opics</span></b><b><span
  lang=SR-CYRL-RS style='font-size:10.0pt;font-family:"Verdana","sans-serif"'><br>
  </span></b><span lang=SR-CYRL-RS style='font-size:9.0pt;font-family:"Verdana","sans-serif"'>MEMS
  sen</span><span lang=EN-US style='font-size:9.0pt;font-family:"Verdana","sans-serif"'>sors</span><span
  lang=SR-CYRL-RS style='font-size:9.0pt;font-family:"Verdana","sans-serif"'><br>
  MEMS a</span><span lang=EN-US style='font-size:9.0pt;font-family:"Verdana","sans-serif"'>ctuators</span><span
  lang=SR-CYRL-RS style='font-size:9.0pt;font-family:"Verdana","sans-serif"'><br>
  Piezo</span><span lang=EN-US style='font-size:9.0pt;font-family:"Verdana","sans-serif"'>resistive
  pressure sensors</span><span lang=SR-CYRL-RS style='font-size:9.0pt;
  font-family:"Verdana","sans-serif"'><br>
  &nbsp; - <a href="../research.topics/high.t.presure.sensor.eng.htm">MEMS <span
  lang=EN-US>low pressure sensor chip for elevated operating temperatures up to</span>
  300<sup>0</sup><span lang=EN-US>C</span>&nbsp;</a><br>
  &nbsp; - <a href="../research.topics/overpressure.block.eng.htm">MEMS <span
  lang=EN-US>pressure sensor chip with built-in overpressure protection</span></a></span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt;font-family:
  "Verdana","sans-serif"'><a href="../research.topics/zeebeck.eng.htm"><span
  lang=EN-US>Multipurpose</span> MEMS sen<span lang=EN-US>sors based on Zeebeck
  effect</span></a></span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt;font-family:
  "Verdana","sans-serif"'><a href="../research.topics/inertial.eng.htm">Iner<span
  lang=EN-US>tial sensors</span></a></span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt;font-family:
  "Verdana","sans-serif"'><a href="../research.topics/microreactor.eng.htm">MEMS
  mi<span lang=EN-US>c</span>rorea<span lang=EN-US>c</span>tor<span lang=EN-US>s</span></a>&nbsp;</span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt;font-family:
  "Verdana","sans-serif"'><a href="../research.topics/microactuator.eng.htm">Mi<span
  lang=EN-US>c</span>roa<span lang=EN-US>c</span>tuator<span lang=EN-US>s</span></a>&nbsp;</span></p>
  <p class=MsoNormal style='margin-top:0cm;margin-right:72.0pt;margin-bottom:
  12.0pt;margin-left:0cm'><span lang=SR-CYRL-RS style='font-size:9.0pt;
  font-family:"Verdana","sans-serif"'>silic</span><span lang=EN-US
  style='font-size:9.0pt;font-family:"Verdana","sans-serif"'>on</span><span
  lang=EN-US style='font-size:9.0pt;font-family:"Verdana","sans-serif"'> </span><span
  lang=EN-US style='font-size:9.0pt;font-family:"Verdana","sans-serif"'>PIN ph</span><span
  lang=SR-CYRL-RS style='font-size:9.0pt;font-family:"Verdana","sans-serif"'>otodiode</span><span
  lang=EN-US style='font-size:9.0pt;font-family:"Verdana","sans-serif"'>s</span></p>
  <p><span lang=SR-CYRL-RS>&nbsp;</span></p>
  <p style='margin-top:5.0pt;margin-right:72.0pt;margin-bottom:0cm;margin-left:
  0cm;margin-bottom:.0001pt'><b><span lang=EN-US style='font-size:14.0pt;
  font-family:"Verdana","sans-serif";color:#C00000'>&nbsp;</span></b></p>
  </td>
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font-family:"Verdana","sans-serif";color:#C00000'>&nbsp;</span></b></p>

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