MEMS and NEMS structures, components, devices and systems
Group leaders: Žarko Lazić, Milče M. Smilјanić
The group deals with the fundamental concepts, design, fabrication and testing of structures, components, devices and systems. This includes concept, design and fabrication of MEMS and NEMS sensor and actuator chips, as well as the development of specific procedures in planar technologies and micromachining.
silicon PIN photodiodes