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  <p style='margin-top:5.0pt;margin-right:72.0pt;margin-bottom:0cm;margin-left:
  0cm;margin-bottom:.0001pt'><b><span lang=EN-US style='font-size:14.0pt;
  font-family:"Verdana","sans-serif";color:#C00000'>Planar and MEMS technologies</span></b></p>
  <p style='margin-top:5.0pt;margin-right:72.0pt;margin-bottom:0cm;margin-left:
  0cm;margin-bottom:.0001pt'><span lang=SR-CYRL-RS style='font-size:9.0pt;
  font-family:"Verdana","sans-serif"'>&nbsp;</span></p>
  <p><span lang=EN-US style='font-size:10.0pt;font-family:"Verdana","sans-serif";
  color:black'>Group leader</span><span lang=SR-CYRL-RS style='font-size:10.0pt;
  font-family:"Verdana","sans-serif";color:black'>: Vesna Jović</span></p>
  <p><span lang=EN-US style='font-size:10.0pt;font-family:"Verdana","sans-serif";
  color:black'>The group deals with the development and application of planar
  technologies, including photolithography, silicon oxidation and diffusion,
  thin film deposition, development and application of different methods of
  micro and nanofabrication including bulk and surface micromachining.</span></p>
  <p><span lang=EN-US style='font-size:10.0pt;font-family:"Verdana","sans-serif";
  color:black'> </span><img width=559 height=338
  src="planar.eng_files/image001.jpg"><span lang=SR-CYRL-RS style='font-size:
  10.0pt;font-family:"Verdana","sans-serif";color:black'>&nbsp;</span></p>
  <p class=MsoNormal style='margin-top:0cm;margin-right:72.0pt;margin-bottom:
  12.0pt;margin-left:0cm'><b><span lang=SR-CYRL-RS style='font-size:10.0pt;
  font-family:"Verdana","sans-serif"'>T</span></b><b><span lang=EN-US
  style='font-size:10.0pt;font-family:"Verdana","sans-serif"'>opics</span></b><b><span
  lang=SR-CYRL-RS style='font-size:10.0pt;font-family:"Verdana","sans-serif"'><br>
  </span></b><span lang=SR-CYRL-RS style='font-size:9.0pt;font-family:"Verdana","sans-serif"'>planar</span><span
  lang=EN-US style='font-size:9.0pt;font-family:"Verdana","sans-serif"'>
  technologies</span><span lang=SR-CYRL-RS style='font-size:9.0pt;font-family:
  "Verdana","sans-serif"'><br>
  </span><span lang=EN-US style='font-size:9.0pt;font-family:"Verdana","sans-serif"'>Bulk
  and surface micromachining</span></p>
  <p><span lang=SR-CYRL-RS>&nbsp;</span></p>
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  0cm;margin-bottom:.0001pt'><b><span lang=EN-US style='font-size:14.0pt;
  font-family:"Verdana","sans-serif";color:#C00000'>&nbsp;</span></b></p>
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font-family:"Verdana","sans-serif";color:#C00000'>&nbsp;</span></b></p>

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