Laboratory for planar and MEMS technologies

- Photolithography (yellow room 1 614, yellow room 2 602b)

- Planar technologies 612

- MEMS technologies/micromachining 614

- Thin film technologies 614

 

 

Laboratory for planar and MEMS technologies is the central technological laboratory of the Centre of microelectronic technologies and is dedicated to the fabrication of microchips from concept to a finished product. It consists of several units complementing each other, comprising a complex technological system.

 

1. Design and fabrication of photolithographic masks

2. Oksidacija i difuzija

3. Deponovanje tankih slojeva

6. Nagrizanje silicijuma i formiranje membrane (mikromašinstvo)

7. Sečenje silicijumskih pločica na čipove

8. Montaža čipova na kućište

9. Karakterizacija senzora