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<p class=MsoNormal><span lang=EN-US style='font-size:9.0pt;font-family:"Arial","sans-serif"'>&nbsp;</span></p>

<table class=MsoNormalTable border=0 cellspacing=0 cellpadding=0
 style='border-collapse:collapse'>
 <tr>
  <td width=590 valign=top style='width:442.8pt;padding:0cm 5.4pt 0cm 5.4pt'>
  <h2><span lang=EN-US style='font-size:12.0pt;font-family:"Arial","sans-serif";
  color:#C00000;font-style:normal'>An overview of main research topics</span></h2>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt;font-family:
  "Arial","sans-serif";color:#C00000'>&nbsp;</span></p>
  <h3><span lang=SR-CYRL-RS style='font-size:10.0pt;font-family:"Arial","sans-serif";
  color:#C00000;font-style:normal'>Ba</span><span lang=EN-US style='font-size:
  10.0pt;font-family:"Arial","sans-serif";color:#C00000;font-style:normal'>sic
  research in microsystem technologies</span></h3>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt;font-family:
  "Arial","sans-serif";color:#C00000'>&nbsp;</span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt'><a
  href="research.topics/adsorp.eng.htm">Adsorpcion-desorp<span lang=EN-US>tion
  processes in </span>MEMS/NEMS</a></span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt'><a
  href="research.topics/noise.eng.htm">Flu<span lang=EN-US>c</span>tua<span
  lang=EN-US>tions and noise in microsystems</span></a></span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt'><a
  href="research.topics/new.technologies.eng.htm">N<span lang=EN-US>ew
  technological processes in</span> MEMS <span lang=EN-US>and</span> NEMS</a></span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt;font-family:
  "Arial","sans-serif"'>&nbsp;</span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt;font-family:
  "Arial","sans-serif"'>&nbsp;</span></p>
  <h3><span lang=EN-US style='font-size:10.0pt;font-family:"Arial","sans-serif";
  color:#C00000;font-style:normal'>Building blocks for microsystems</span></h3>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt;font-family:
  "Arial","sans-serif";color:#333399'>&nbsp;</span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt'><a
  href="research.topics/microcantilevers.eng.htm">Mi<span lang=EN-US>c</span>ro
  <span lang=EN-US>and</span> nano<span lang=EN-US>cantilevers</span></a></span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt'><a
  href="research.topics/metamaterials.eng.htm">Metamaterial<span lang=EN-US>s</span></a></span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt'><a
  href="research.topics/plasmonics.eng.htm">Pla<span lang=EN-US>s</span>moni<span
  lang=EN-US>cs</span></a></span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt'><a
  href="research.topics/nanophotonics.eng.htm">Nano<span lang=EN-US>ph</span>otoni<span
  lang=EN-US>cs</span></a></span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt'><a
  href="research.topics/nanomembranes.eng.htm">Nanomembrane<span lang=EN-US>s</span></a></span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt'><a
  href="research.topics/nanoparticles.eng.htm">Nano<span lang=EN-US>particles</span>&nbsp;</a></span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt'><a
  href="research.topics/microindent.eng.htm"><span lang=EN-US>C</span>ompo<span
  lang=EN-US>s</span>it<span lang=EN-US>e systems thin film-substrate</span></a></span></p>
  <p class=MsoNormal style='text-align:justify'><b><span lang=SR-CYRL-RS
  style='font-size:9.0pt;font-family:"Arial","sans-serif"'>&nbsp;</span></b><span
  lang=SR-CYRL-RS style='font-size:9.0pt;font-family:"Arial","sans-serif"'>&nbsp;</span></p>
  <h3><span lang=SR-CYRL-RS style='font-size:10.0pt;font-family:"Arial","sans-serif";
  color:#C00000;font-style:normal'>Mi</span><span lang=EN-US style='font-size:
  10.0pt;font-family:"Arial","sans-serif";color:#C00000;font-style:normal'>c</span><span
  lang=SR-CYRL-RS style='font-size:10.0pt;font-family:"Arial","sans-serif";
  color:#C00000;font-style:normal'>ro </span><span lang=EN-US style='font-size:
  10.0pt;font-family:"Arial","sans-serif";color:#C00000;font-style:normal'>and</span><span
  lang=SR-CYRL-RS style='font-size:10.0pt;font-family:"Arial","sans-serif";
  color:#C00000;font-style:normal'> nanos</span><span lang=EN-US
  style='font-size:10.0pt;font-family:"Arial","sans-serif";color:#C00000;
  font-style:normal'>y</span><span lang=SR-CYRL-RS style='font-size:10.0pt;
  font-family:"Arial","sans-serif";color:#C00000;font-style:normal'>stem</span><span
  lang=EN-US style='font-size:10.0pt;font-family:"Arial","sans-serif";
  color:#C00000;font-style:normal'>s</span></h3>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt;font-family:
  "Arial","sans-serif";color:#C00000'>&nbsp;</span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt'><a
  href="research.topics/high.t.presure.sensor.eng.htm">MEMS <span lang=EN-US>chip
  of low pressure sensor for elevated operating temperatures up </span>300<sup>0</sup><span
  lang=EN-US>C</span>&nbsp;</a></span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt'><a
  href="research.topics/overpressure.block.eng.htm">MEMS <span lang=EN-US>chip
  of pressure sensor with built-in overpressure protection</span></a></span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt'><a
  href="research.topics/zeebeck.eng.htm"><span lang=EN-US>Multipurpose</span>
  MEMS sen<span lang=EN-US>s</span>or<span lang=EN-US>s based on Zeebeck effect</span></a></span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt'><a
  href="research.topics/plasmonic.sensors.eng.htm">Nanopla<span lang=EN-US>s</span>mon<span
  lang=EN-US>ic chemical and biological sensors</span></a></span></p>
  <p class=MsoNormal><span lang=EN-US style='font-size:9.0pt'><a
  href="research.topics/microcantilever.sensors.eng.htm">Ch<span
  lang=SR-CYRL-RS>emi</span>cal and biological sensors based on
  micro/nanocantilevers</a></span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt'><a
  href="research.topics/mercury.eng.htm">Sen<span lang=EN-US>s</span>or <span
  lang=EN-US>of </span>elementar<span lang=EN-US>y mercury</span></a></span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt'><a
  href="research.topics/inertial.eng.htm">Iner<span lang=EN-US>t</span>ial sen<span
  lang=EN-US>s</span>or<span lang=EN-US>s</span></a></span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt'><a
  href="research.topics/microreactor.eng.htm">MEMS mi<span lang=EN-US>c</span>rorea<span
  lang=EN-US>c</span>tor<span lang=EN-US>s</span>&nbsp;</a></span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt'><a
  href="research.topics/microactuator.eng.htm">Mi<span lang=EN-US>c</span>roa<span
  lang=EN-US>c</span>tuator<span lang=EN-US>s</span>&nbsp;</a></span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt;font-family:
  "Arial","sans-serif"'>&nbsp;</span></p>
  <h3><span lang=SR-CYRL-RS style='font-size:10.0pt;font-family:"Arial","sans-serif";
  color:#C00000;font-style:normal'>Mi</span><span lang=EN-US style='font-size:
  10.0pt;font-family:"Arial","sans-serif";color:#C00000;font-style:normal'>c</span><span
  lang=SR-CYRL-RS style='font-size:10.0pt;font-family:"Arial","sans-serif";
  color:#C00000;font-style:normal'>rooptoele</span><span lang=EN-US
  style='font-size:10.0pt;font-family:"Arial","sans-serif";color:#C00000;
  font-style:normal'>c</span><span lang=SR-CYRL-RS style='font-size:10.0pt;
  font-family:"Arial","sans-serif";color:#C00000;font-style:normal'>trome</span><span
  lang=EN-US style='font-size:10.0pt;font-family:"Arial","sans-serif";
  color:#C00000;font-style:normal'>c</span><span lang=SR-CYRL-RS
  style='font-size:10.0pt;font-family:"Arial","sans-serif";color:#C00000;
  font-style:normal'>hani</span><span lang=EN-US style='font-size:10.0pt;
  font-family:"Arial","sans-serif";color:#C00000;font-style:normal'>cal</span><span
  lang=SR-CYRL-RS style='font-size:10.0pt;font-family:"Arial","sans-serif";
  color:#C00000;font-style:normal'> s</span><span lang=EN-US style='font-size:
  10.0pt;font-family:"Arial","sans-serif";color:#C00000;font-style:normal'>y</span><span
  lang=SR-CYRL-RS style='font-size:10.0pt;font-family:"Arial","sans-serif";
  color:#C00000;font-style:normal'>stem</span><span lang=EN-US
  style='font-size:10.0pt;font-family:"Arial","sans-serif";color:#C00000;
  font-style:normal'>s</span><span lang=SR-CYRL-RS style='font-size:10.0pt;
  font-family:"Arial","sans-serif";color:#C00000;font-style:normal'> (MOEMS)</span></h3>
  <p class=MsoNormal style='page-break-after:avoid'><span lang=SR-CYRL-RS
  style='font-size:9.0pt;font-family:"Arial","sans-serif";color:#C00000'>&nbsp;</span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt'><a
  href="research.topics/UV.diode.eng.htm">Ultra<span lang=EN-US>violet</span>
  Si <span lang=EN-US>ph</span>otodete<span lang=EN-US>c</span>tor<span
  lang=EN-US>s</span>&nbsp;</a></span></p>
  <p class=MsoNormal><span lang=EN-US style='font-size:9.0pt'><a
  href="research.topics/two-color.pin.eng.htm">Two-color<span lang=SR-CYRL-RS>
  Si PIN </span>ph<span lang=SR-CYRL-RS>otodete</span>c<span lang=SR-CYRL-RS>tor</span>s</a></span></p>
  <p class=MsoNormal><span lang=EN-US style='font-size:9.0pt'><a
  href="research.topics/infrared.plasmonic.eng.htm">Enhancement of IR detectors
  by plasmonic materials</a></span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt;font-family:
  "Arial","sans-serif"'>&nbsp;</span></p>
  <h3><span lang=SR-CYRL-RS style='font-size:10.0pt;font-family:"Arial","sans-serif";
  color:#C00000;font-style:normal'>Industri</span><span lang=EN-US
  style='font-size:10.0pt;font-family:"Arial","sans-serif";color:#C00000;
  font-style:normal'>al measurement systems based on</span><span
  lang=SR-CYRL-RS style='font-size:10.0pt;font-family:"Arial","sans-serif";
  color:#C00000;font-style:normal'> MEMS/NEMS</span></h3>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt;font-family:
  "Arial","sans-serif";color:#333399'>&nbsp;</span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt'><a
  href="research.topics/intelligent.transmitter.eng.htm">Intel<span lang=EN-US>l</span>igent<span
  lang=EN-US> industrial measurement transmitters</span></a></span></p>
  <p class=MsoNormal><span lang=SR-CYRL-RS style='font-size:9.0pt'><a
  href="research.topics/sensor.networks.eng.htm">Sen<span lang=EN-US>s</span>or<span
  lang=EN-US> networks</span></a></span></p>
  <p class=MsoNormal><b><span lang=SR-CYRL-RS style='font-size:9.0pt;
  font-family:"Arial","sans-serif"'>&nbsp;</span></b></p>
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