Micro and nanocantilevers


Microcantilevers are miniature mechanical structures with their function dependent on their mechanical deformation under external stimulus. Originally they were used as the sensitive element of scanning force microscopes (SPM, AFM), and then as the basic element of ultrasensitive sensors of numerous physical and chemical parameters as well as the element of RF MEMS and NEMS devices.

     Since 2000 the researchers of CMT performed theoretical and experimental research in the field of micro/nanocantilever sensors and RF MEMS/NEMS resonant cantilevers. In the field of sensors, theoretical research is performed of mechanical behaviour of micro/nanocantilevers with homogeneous composition, as well as that of bimaterial cantilevers, exposed to different stimuli. CMT researchers fabricated unique microcantilevers with piezoresistive and optical displacement detection. Gold microcantilevers for detection of small electromagnetic forces are also designed and fabricated in CMT. Besides that, we developed a method for characterization of mechanical parameters of cantilevers built of conductive materials or containing a conductive contour.



     In the field of RF MEMS/NEMS the CMT researchers investigate phase noise of these components, which significantly influences the performance of the system, and thus the possibilities to apply micro/nanocantilevers in contemporary and future wireless devices. Adsorption-desorption caused phase noise is investigated, which is specific for RF MEMS/NEMS electromechanical resonators, as compared to microelectronic devices and larger electromechanical components, since it can become dominant with a decrease of cantilever dimensions. An analyses of the adsorption of gas mixture at the surface of a micro/nanoresonator is an original result of CMT researchers. It enables optimization of the design of components, devices and systems and the development of methods for minimization of signal degradation.