Silicon pressure sensors

 

All of our sensors are based on our proprietary micromachined piezoresistive pressure sensor chips fabricated in our laboratories. They are delivered fully electrically tested in a housing (sensors for medical applications are delivered as chips only).

 

Low Pressure Sensors

NP and NPT series sensors are specially designed for low pressure measurements, below 0.5 bar. A pressure sensor is a sensitive element converting mechanical strain into electrical signal. An NP or NPT series sensor is miniature piezoresistive Wheatstone bridge fabricated by planar technology in a profiled silicon diaphragm produced by micromachining. NPT series pressure sensors differ from NP series because they are equipped with an additional temperature sensor, built into the same chip by planar technology. The built-in temperature sensor enables microprocessor driven correction of sensor errors. This sensor type is especially convenient for the use in industrial pressure transmitters. NP and NPT series pressure sensors are built into different housings, depending on application.

Download pdf data sheets for our low pressure sensors here.

 

Medium Pressure Sensors

SP, SPT series pressure sensors are intended for measurement of medium pressures, from 0.25 to 25 bar. A pressure sensor is a sensitive element converting mechanical strain into electrical signal. An SP, SPT series sensor is miniature piezoresistive Wheatstone bridge fabricated by planar technology in a circular or square silicon diaphragm produced by micromachining. A SPT series sensor differs from a NP series sensor because it is equipped with an additional temperature sensor, built into the same chip by planar technology. Sensors are built into TO-5 or other housings, depending on application.

Download pdf data sheets for our medium pressure sensors here.

 

High Pressure Sensors

VP, VPT series pressure sensors are intended for measurement of high pressures, from 25 to 1000 bar. A pressure sensor is a sensitive element converting mechanical strain into electrical signal. A VP series sensor is miniature piezoresistive Wheatstone bridge fabricated by planar technology in a circular or square micromachined Si diaphragm.

Download pdf data sheets for our high pressure sensors here.

 

32-Element Pressure Sensor Array

MSP-32 is intended for simultaneous pressure measurement in 32 different points. It consists of 32 precision semiconductor pressure sensors manufactured by Iso-Boron process, a built-in multiplexer and an instrumentation amplifier. Pressure sensors are built in a thermostatic chamber. The digitally controlled multiplexer enables up to 10,000 measurements per second in arbitrary order. MSP-32 is delivered fully tested, together with control software support.

Download pdf data sheets for our 32-element pressure sensor arrays here.

 

Pressure Sensor Chips for Medical Use

The SP-7 pressure sensor is intended for the use in medical instrumen­tation. Special design and use of Iso-Boron manufacturing technology enable single step and single temperature compensation without troubles with NTC resistor. All chips are 100% electrically tested. Sensor chips are shipped in waffle pack. No orientation is necessary.

Download pdf data sheets for our medical pressure sensor chips here.